Abstract
A novel electrostatic servo capacitive vacuum sensor has been successfully fabricated using P++ silicon etch-stop and vacuum anodic bonding techniques. In order to maintain the reference cavity in high vacuum, a non-evaporable getter(NEG) is used as a small vacuum pump. Dynamic range of the sensor can be extended by a servo system. The pressure response of the sensor is good. The servo voltage vs pressure is measured and theoretical data agrees with the experimental results.
| Original language | English |
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| Pages | 1457-1460 |
| Number of pages | 4 |
| Publication status | Published - 1997 Jan 1 |
| Event | Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA Duration: 1997 Jun 16 → 1997 Jun 19 |
Other
| Other | Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) |
|---|---|
| City | Chicago, IL, USA |
| Period | 97/6/16 → 97/6/19 |
ASJC Scopus subject areas
- Engineering(all)
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Cite this
Wang, Y., & Esashi, M. (1997). Novel electrostatic servo capacitive vacuum sensor. 1457-1460. Paper presented at Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2), Chicago, IL, USA, .