Novel electrostatic servo capacitive vacuum sensor

Yuelin Wang, Masayoshi Esashi

Research output: Contribution to conferencePaper

21 Citations (Scopus)

Abstract

A novel electrostatic servo capacitive vacuum sensor has been successfully fabricated using P++ silicon etch-stop and vacuum anodic bonding techniques. In order to maintain the reference cavity in high vacuum, a non-evaporable getter(NEG) is used as a small vacuum pump. Dynamic range of the sensor can be extended by a servo system. The pressure response of the sensor is good. The servo voltage vs pressure is measured and theoretical data agrees with the experimental results.

Original languageEnglish
Pages1457-1460
Number of pages4
Publication statusPublished - 1997 Jan 1
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA
Duration: 1997 Jun 161997 Jun 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
CityChicago, IL, USA
Period97/6/1697/6/19

ASJC Scopus subject areas

  • Engineering(all)

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  • Cite this

    Wang, Y., & Esashi, M. (1997). Novel electrostatic servo capacitive vacuum sensor. 1457-1460. Paper presented at Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2), Chicago, IL, USA, .