Novel doping technology for ultra-shallow junction fabrication: Boron diffusion from boron-adsorbed layer by rapid thermal annealing

Ki Seon Kim, Yun Heub Song, Ki Tae Park, Hiroyuki Kurino, Takashi Matsuura, Kazuhiro Hane, Mitsumasa Koyanagi

Research output: Contribution to journalConference article

15 Citations (Scopus)

Abstract

A new doping method to fabricate an ultra-shallow junction for the sub-0.1 μm pMOSFET was investigated, in which boron in an absorbed layer diffused into Si substrate during rapid thermal annealing (RTA) at high temperature. This method made it possible to control the junction depth and doping concentration by varying quantitatively the boron coverage and to achieve a high doping efficiency due to the high surface localization of boron. The boron diffusion from an adsorbed layer with low boron coverage of below approximately 0.45 ML produced extremely shallow junction (below approximately 25 nm) with low sheet resistance (below approximately 2.5 kΩ/sq.). This doping technique was applied to form a shallow source and drain extension region for sub-0.1 μm pMOSFET. The pMOSFET fabricated showed a fairly good performance, indicating an effective suppression of the short channel effect. This suggests that the boron atomic-layer doping is a more promising doping chnique to form ultra-shallow junctions with good electrical characteristics.

Original languageEnglish
Pages (from-to)207-212
Number of pages6
JournalThin Solid Films
Volume369
Issue number1
DOIs
Publication statusPublished - 2000 Jul 3
EventThe International Joint Conference on Silicon Epitaxyand Heterostructures (IJC-SI) - Miyagi, Jpn
Duration: 1999 Sep 121999 Sep 17

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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