Novel application of sputtered-sliced concentric multilayers to various optical elements for synchrotron radiation high-brilliance X-ray beamlines at SPring-8

S. Tamura, M. Yasumoto, N. Kamijo, Y. Suzuki, M. Awaji, A. Takeuchi, H. Takano, K. Uesugi

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Three new types of optical elements for the synchrotron radiation (SR) high-brilliance X-ray beamlines have been developed: (1) a spatial resolution test pattern for X-ray computed tomography (CT), (2) a spatial resolution test pattern for X-ray scanning microscopy, and (3) a condenser device for X-ray imaging microscopy. These optical elements are composed of concentric multilayers of alternating high-Z and low-Z material deposited on a wire substrate. The characteristics of these elements have been tested at the SR facilities of Super Photon ring-8 GeV. Optical element (1) yielded a pattern of alternating opaque and transparent concentric rings with a film thickness of 1 μm. For (2), the test pattern was shown to work well in the high-energy X-ray region at 28 keV. Use of the condenser device with optical element (3) produced an absorption contrast image of a test pattern without modulation by the coherence of the source. These optical elements may play important roles in the future development of various analytical areas with high spatial resolution in the high-energy X-ray region at the SR high-brilliance X-ray beamlines.

Original languageEnglish
Pages (from-to)741-746
Number of pages6
JournalVacuum
Volume74
Issue number3-4 SPEC. ISS.
DOIs
Publication statusPublished - 2004 Jun 7
Externally publishedYes

Keywords

  • Concentric multilayer
  • Multilayer
  • Optical element
  • SR
  • Sputtering

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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