Normally closed electrostatic microvalve with pressure balance mechanism for portable fuel cell application

Kazushi Yoshida; Shuji Tanaka; Yosuke Hagihara; Shigeaki Tomonari; Masayoshi Esashi

doi:10.1016/j.sna.2009.11.030

Normally closed electrostatic microvalve with pressure balance mechanism for portable fuel cell application

Kazushi Yoshida, Shuji Tanaka, Yosuke Hagihara, Shigeaki Tomonari, Masayoshi Esashi

Research output: Contribution to journal › Article

20 Citations (Scopus)

Abstract

This paper describes the fabrication and evaluation of an electrostatic microvalve to control the concentration of methanol in direct methanol fuel cell (DMFC) systems. The microvalve uses a novel pressure balance mechanism to realize normally closed operation against pressurized fuel, and maintained close state up to an input pressure of 40 kPa as designed. The driving voltage ranged from 50 V to 110 V depending on the input pressure. The measured results were compared with simulation results, and showed fair agreement with simulation results. Finally, the developed microvalve was applied to a prototyped portable DMFC system, and stable electric generation was demonstrated. Crown

Original language	English
Pages (from-to)	290-298
Number of pages	9
Journal	Sensors and Actuators, A: Physical
Volume	157
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2009.11.030
Publication status	Published - 2010 Feb 1

Keywords

Electrostatic actuator
Fuel cell
Microvalve

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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Yoshida, K., Tanaka, S., Hagihara, Y., Tomonari, S., & Esashi, M. (2010). Normally closed electrostatic microvalve with pressure balance mechanism for portable fuel cell application. Sensors and Actuators, A: Physical, 157(2), 290-298. https://doi.org/10.1016/j.sna.2009.11.030

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abstract = "This paper describes the fabrication and evaluation of an electrostatic microvalve to control the concentration of methanol in direct methanol fuel cell (DMFC) systems. The microvalve uses a novel pressure balance mechanism to realize normally closed operation against pressurized fuel, and maintained close state up to an input pressure of 40 kPa as designed. The driving voltage ranged from 50 V to 110 V depending on the input pressure. The measured results were compared with simulation results, and showed fair agreement with simulation results. Finally, the developed microvalve was applied to a prototyped portable DMFC system, and stable electric generation was demonstrated. Crown",

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AU - Esashi, Masayoshi

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AB - This paper describes the fabrication and evaluation of an electrostatic microvalve to control the concentration of methanol in direct methanol fuel cell (DMFC) systems. The microvalve uses a novel pressure balance mechanism to realize normally closed operation against pressurized fuel, and maintained close state up to an input pressure of 40 kPa as designed. The driving voltage ranged from 50 V to 110 V depending on the input pressure. The measured results were compared with simulation results, and showed fair agreement with simulation results. Finally, the developed microvalve was applied to a prototyped portable DMFC system, and stable electric generation was demonstrated. Crown

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