Normally closed electrostatic microvalve with pressure balance mechanism for portable fuel cell application

Kazushi Yoshida, Shuji Tanaka, Yosuke Hagihara, Shigeaki Tomonari, Masayoshi Esashi

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

This paper describes the fabrication and evaluation of an electrostatic microvalve to control the concentration of methanol in direct methanol fuel cell (DMFC) systems. The microvalve uses a novel pressure balance mechanism to realize normally closed operation against pressurized fuel, and maintained close state up to an input pressure of 40 kPa as designed. The driving voltage ranged from 50 V to 110 V depending on the input pressure. The measured results were compared with simulation results, and showed fair agreement with simulation results. Finally, the developed microvalve was applied to a prototyped portable DMFC system, and stable electric generation was demonstrated. Crown

Original languageEnglish
Pages (from-to)290-298
Number of pages9
JournalSensors and Actuators, A: Physical
Volume157
Issue number2
DOIs
Publication statusPublished - 2010 Feb 1

Keywords

  • Electrostatic actuator
  • Fuel cell
  • Microvalve

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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