Normally-closed electrostatic micro valve with pressure balance mechanism for portable fuel cell application

Kazushi Yoshida, Yosuke Hagihara, Shuji Tanaka, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

This paper describes an electrostatic micro valve which controls fuel in a portable direct methanol fuel cell (DMFC) system under development. A novel pressure balance mechanism is adopted to achieve both normally-closed operation against pressurized fuel and low voltage operation. The fabricated micro valve was tested using air as a working fluid in terms of leak pressure and driving voltage. The micro valve kept close state at input pressure from 0 kPa to 20 kPa. The driving voltage to fully open the micro valve was from 30 V to 60 V. These results well agree with the theoretical estimation.

Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages722-725
Number of pages4
Publication statusPublished - 2006
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 2006 Jan 222006 Jan 26

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
Country/TerritoryTurkey
CityIstanbul
Period06/1/2206/1/26

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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