Nonlinearity compensation of micro-mirror hard-spring by electrostatic combs

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Torsion bar of micro-mirror scanner often shows hard-spring effect, which bends the oscillation curve and causes instability such as hysteresis. In this report, we propose a method to compensate equivalently the hard-spring nonlinearity of micro-mirror scanner using the electrostatic combs. A 0.02% bend of the oscillation curve of the micro-mirror scanner was compensated by an applied comb voltage of 12V and the oscillation curve became symmetric at the peak frequency.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1987-1990
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - 2017 Jul 26
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: 2017 Jun 182017 Jun 22

Publication series

NameTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period17/6/1817/6/22

Keywords

  • Electrostatic comb
  • Micro mirror
  • Nonlinear spring

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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  • Cite this

    Izawa, T., Sasaki, T., & Hane, K. (2017). Nonlinearity compensation of micro-mirror hard-spring by electrostatic combs. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1987-1990). [7994460] (TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994460