Nonlinear spring tuning by electrostatic combs in micro mirror scanner

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Tuning of operation frequency of resonant-mode micro-mirror scanner is often needed for compensating fabrication errors. Moreover, the oscillation curve of the scanner often suffers a bend by a hard-spring effect of torsion bar. Combining an electrostatic comb spring with the torsion bar, the resonant frequency of the scanner is tuned and the hard spring nonlinearity is compensated. First, the theoretical approach is described. Next, from the experiments, it is shown that the proposed method is effective by applying DC and AC voltages to the electrostatic comb spring. The adjustments of the resonant frequency and the hard spring nonlinearity are useful for improving the operation characteristics of micro mirror scanner.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018
EditorsRomolo Marcelli, Yoshio Mita, Stewart Smith, Francis Pressecq, Pascal Nouet, Frederick Mailly, Peter Schneider
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781538661994
DOIs
Publication statusPublished - 2018 Jun 22
Event20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018 - Roma, Italy
Duration: 2018 May 222018 May 25

Publication series

NameSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018

Other

Other20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018
CountryItaly
CityRoma
Period18/5/2218/5/25

Keywords

  • Comb-drive actuator
  • Silicon micro-mirror
  • Spring non linearity

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Safety, Risk, Reliability and Quality
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

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