Nonlinear rotational spring with tension for stabilizing electrostatically driven micromirror

Minoru Sasaki, Shinya Kumagai, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Thin film torsion bar with tension is introduced in the micromirror realizing the low-voltage driving. The rotational spring of this torsion bar shows the large nonlinearity which is observed in the change of the ringing frequency. The curve of the mirror rotation angle against the driving voltage becomes rather linear increasing the stable region. The origin of the nonlinearity is investigated. The combination between the tension and the vertical displacement of the torsion bar is considered for expressing the experimental result.

Original languageEnglish
Title of host publication2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008, with Symposium on "COE for Education and Research of Micro-Nano Mechatronics"
Pages225-230
Number of pages6
DOIs
Publication statusPublished - 2008 Dec 1
Event2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008, with Symposium on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "System Cell Engineering by Multi-scale Manipulation" - Nagoya, Japan
Duration: 2008 Nov 62008 Nov 9

Publication series

Name2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008

Other

Other2008 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2008, with Symposium on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "System Cell Engineering by Multi-scale Manipulation"
CountryJapan
CityNagoya
Period08/11/608/11/9

ASJC Scopus subject areas

  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Nonlinear rotational spring with tension for stabilizing electrostatically driven micromirror'. Together they form a unique fingerprint.

Cite this