TY - JOUR
T1 - Nonlinear optical polymer patterned by nanoimprint lithography as a photonic crystal waveguide structure
AU - Okinaka, Motoki
AU - Inoue, Shin Ichiro
AU - Tsukagoshi, Kazuhito
AU - Aoyagi, Yoshinobu
N1 - Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2006/1
Y1 - 2006/1
N2 - A photonic crystal (PC) waveguide structure has been imprinted onto a nonlinear optical (NLO) polymer using thermal nanoimprint lithography (NIL). The imprint characteristics of Disperse Red 1 doped poly(methylmethacrylate) as the NLO polymer are evaluated by atomic force microscope. A waveguide structure with a uniform height of 650 nm is obtained at an imprint temperature of 120 °C. A peeling problem at the interfaces between constructing layers is solved by preparation of an appropriate substrate structure. Finally, polarized reflectivity measurement was performed for the imprinted PC waveguide structure. Several sharp dips corresponding to the formation of photonic band dispersion are observed. It was demonstrated that NIL is a direct path to the precise patterning of PC waveguide structures.
AB - A photonic crystal (PC) waveguide structure has been imprinted onto a nonlinear optical (NLO) polymer using thermal nanoimprint lithography (NIL). The imprint characteristics of Disperse Red 1 doped poly(methylmethacrylate) as the NLO polymer are evaluated by atomic force microscope. A waveguide structure with a uniform height of 650 nm is obtained at an imprint temperature of 120 °C. A peeling problem at the interfaces between constructing layers is solved by preparation of an appropriate substrate structure. Finally, polarized reflectivity measurement was performed for the imprinted PC waveguide structure. Several sharp dips corresponding to the formation of photonic band dispersion are observed. It was demonstrated that NIL is a direct path to the precise patterning of PC waveguide structures.
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U2 - 10.1116/1.2151911
DO - 10.1116/1.2151911
M3 - Article
AN - SCOPUS:31544474358
VL - 24
SP - 271
EP - 273
JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
SN - 1071-1023
IS - 1
ER -