Noncontact electrostatic force microscopy for surface profile measurement of insulating materials

Shigeaki Goto; Minglei Li; Zhigang Jia; So Ito; Yuki Shimizu; Wei Gao

Noncontact electrostatic force microscopy for surface profile measurement of insulating materials

Shigeaki Goto, Minglei Li, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao

ENG - Finemechanics

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

This paper reports the experimental result of noncontact surface profile measurement of an insulating sample made of glass with the developed electrostatic force microscope (EFM). Noncontact scanning was carried out maintaining the tip-to-sample distance of larger than 100 nm, which significantly reduces the risk of collision between the sample and the tip. The algorism named "dual-height method" calculated the profile image with cancelling the fluctuation of the tip-to-sample distance. The same sample was measured also with the AFM, and the EFM profile images agreed with the AFM profile image quantitatively.

Original language	English
Publication status	Published - 2015 Oct 18
Event	8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan Duration: 2015 Oct 18 → 2015 Oct 22

Other

Other	8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
Country/Territory	Japan
City	Kyoto
Period	15/10/18 → 15/10/22

Keywords

Electrostatic force
Glass
Measurement
Noncontact
Scanning probe microscopy
Topography

ASJC Scopus subject areas

Industrial and Manufacturing Engineering

Cite this

Noncontact electrostatic force microscopy for surface profile measurement of insulating materials. / Goto, Shigeaki; Li, Minglei; Jia, Zhigang; Ito, So; Shimizu, Yuki ; Gao, Wei.

2015. Paper presented at 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, Kyoto, Japan.

Research output: Contribution to conference › Paper › peer-review

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abstract = "This paper reports the experimental result of noncontact surface profile measurement of an insulating sample made of glass with the developed electrostatic force microscope (EFM). Noncontact scanning was carried out maintaining the tip-to-sample distance of larger than 100 nm, which significantly reduces the risk of collision between the sample and the tip. The algorism named {"}dual-height method{"} calculated the profile image with cancelling the fluctuation of the tip-to-sample distance. The same sample was measured also with the AFM, and the EFM profile images agreed with the AFM profile image quantitatively.",

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AU - Goto, Shigeaki

AU - Li, Minglei

AU - Jia, Zhigang

AU - Ito, So

AU - Shimizu, Yuki

AU - Gao, Wei

PY - 2015/10/18

Y1 - 2015/10/18

N2 - This paper reports the experimental result of noncontact surface profile measurement of an insulating sample made of glass with the developed electrostatic force microscope (EFM). Noncontact scanning was carried out maintaining the tip-to-sample distance of larger than 100 nm, which significantly reduces the risk of collision between the sample and the tip. The algorism named "dual-height method" calculated the profile image with cancelling the fluctuation of the tip-to-sample distance. The same sample was measured also with the AFM, and the EFM profile images agreed with the AFM profile image quantitatively.

AB - This paper reports the experimental result of noncontact surface profile measurement of an insulating sample made of glass with the developed electrostatic force microscope (EFM). Noncontact scanning was carried out maintaining the tip-to-sample distance of larger than 100 nm, which significantly reduces the risk of collision between the sample and the tip. The algorism named "dual-height method" calculated the profile image with cancelling the fluctuation of the tip-to-sample distance. The same sample was measured also with the AFM, and the EFM profile images agreed with the AFM profile image quantitatively.

KW - Electrostatic force

KW - Glass

KW - Measurement

KW - Noncontact

KW - Scanning probe microscopy

KW - Topography

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M3 - Paper

AN - SCOPUS:84974578256

T2 - 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015

Y2 - 18 October 2015 through 22 October 2015

ER -

Noncontact electrostatic force microscopy for surface profile measurement of insulating materials

Abstract

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Keywords

ASJC Scopus subject areas

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