Noncontact characterization of crystal surface and thin films by the phase velocity scanning of laser interference fringes

K. Yamanaka, H. Nishino, H. Cho, Y. Nagata, T. Koda, M. Inaba, A. Sato, Y. Tsukahara

Research output: Contribution to journalConference articlepeer-review

Abstract

We present the first application of a novel noncontact velocity measurement method of surface acoustic waves (SAW) to evaluation of thin films. This method uses laser interference fringes scanned at the phase velocity of SAW. The scanning interference fringes (SIF) are produced by intersecting two laser beams with a frequency difference. It was found that the Si3N4 film prepared by the low pressure CVD had similar elastic property to that of a sintered body. The dispersive Sezawa waves on the flame hydrolysis deposited SiO2 films on Si (100) surface were detected. Comparing the measured Sezawa wave velocity with calculated velocity, the films were found to be remarkably softer than a bulk SiO2 (fused quartz).

Original languageEnglish
Pages (from-to)1211-1214
Number of pages4
JournalProceedings of the IEEE Ultrasonics Symposium
Volume2
DOIs
Publication statusPublished - 1994
EventProceedings of the 1994 IEEE Ultrasonics Symposium. Part 1 (of 3) - Cannes, Fr
Duration: 1994 Nov 11994 Nov 4

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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