Non-planer Photo-fabrication of an Actuator-Unit from a Shape Memory Alloy Pipe

Takashi Mineta, Yoichi Haga, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)


This paper reports a new photo-fabrication method of an actuator unit from a shape memory alloy (SMA) pipe. Three meandering actuators, which are linked one another, have been fabricated from an SMA pipe. The outer diameter and the wall thickness of the pipe are 600μm and 50μm, respectively. After the SMA pipe was dip coated with positive photoresist, the photoresist was patterned by using projection exposure method for an etching mask. The SMA pipe was electrochemically etched in the LiCl-ethanol solution with a Cu dummy layer, which was deposited on the inside wall of the pipe by electroless plating previously. The batch fabrication method can simplify the assembly of an active catheter, because the actuators are fabricated as a self-assembled unit. Keywords : shape memory alloy, pipe, actuator, non-planer, photo-fabrication.

Original languageEnglish
Pages (from-to)158-162
Number of pages5
JournalIEEJ Transactions on Sensors and Micromachines
Issue number5
Publication statusPublished - 2003 Jan 1
Externally publishedYes


  • actuator
  • non-planer
  • photo-fabrication
  • pipe
  • shape memory alloy

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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