Non-planer Photo-fabrication of an Actuator-Unit from a Shape Memory Alloy Pipe

Takashi Mineta; Yoichi Haga; Masayoshi Esashi

doi:10.1541/ieejsmas.123.158

Non-planer Photo-fabrication of an Actuator-Unit from a Shape Memory Alloy Pipe

Takashi Mineta, Yoichi Haga, Masayoshi Esashi

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

This paper reports a new photo-fabrication method of an actuator unit from a shape memory alloy (SMA) pipe. Three meandering actuators, which are linked one another, have been fabricated from an SMA pipe. The outer diameter and the wall thickness of the pipe are 600μm and 50μm, respectively. After the SMA pipe was dip coated with positive photoresist, the photoresist was patterned by using projection exposure method for an etching mask. The SMA pipe was electrochemically etched in the LiCl-ethanol solution with a Cu dummy layer, which was deposited on the inside wall of the pipe by electroless plating previously. The batch fabrication method can simplify the assembly of an active catheter, because the actuators are fabricated as a self-assembled unit. Keywords : shape memory alloy, pipe, actuator, non-planer, photo-fabrication.

Original language	English
Pages (from-to)	158-162
Number of pages	5
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	123
Issue number	5
DOIs	https://doi.org/10.1541/ieejsmas.123.158
Publication status	Published - 2003 Jan 1

Keywords

actuator
non-planer
photo-fabrication
pipe
shape memory alloy

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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@article{1e437204e71e4ffa87e276f1175ee386,

title = "Non-planer Photo-fabrication of an Actuator-Unit from a Shape Memory Alloy Pipe",

abstract = "This paper reports a new photo-fabrication method of an actuator unit from a shape memory alloy (SMA) pipe. Three meandering actuators, which are linked one another, have been fabricated from an SMA pipe. The outer diameter and the wall thickness of the pipe are 600μm and 50μm, respectively. After the SMA pipe was dip coated with positive photoresist, the photoresist was patterned by using projection exposure method for an etching mask. The SMA pipe was electrochemically etched in the LiCl-ethanol solution with a Cu dummy layer, which was deposited on the inside wall of the pipe by electroless plating previously. The batch fabrication method can simplify the assembly of an active catheter, because the actuators are fabricated as a self-assembled unit. Keywords : shape memory alloy, pipe, actuator, non-planer, photo-fabrication.",

keywords = "actuator, non-planer, photo-fabrication, pipe, shape memory alloy",

author = "Takashi Mineta and Yoichi Haga and Masayoshi Esashi",

year = "2003",

month = jan,

day = "1",

doi = "10.1541/ieejsmas.123.158",

language = "English",

volume = "123",

pages = "158--162",

journal = "IEEJ Transactions on Sensors and Micromachines",

issn = "1341-8939",

publisher = "The Institute of Electrical Engineers of Japan",

number = "5",

}

TY - JOUR

T1 - Non-planer Photo-fabrication of an Actuator-Unit from a Shape Memory Alloy Pipe

AU - Mineta, Takashi

AU - Haga, Yoichi

AU - Esashi, Masayoshi

PY - 2003/1/1

Y1 - 2003/1/1

N2 - This paper reports a new photo-fabrication method of an actuator unit from a shape memory alloy (SMA) pipe. Three meandering actuators, which are linked one another, have been fabricated from an SMA pipe. The outer diameter and the wall thickness of the pipe are 600μm and 50μm, respectively. After the SMA pipe was dip coated with positive photoresist, the photoresist was patterned by using projection exposure method for an etching mask. The SMA pipe was electrochemically etched in the LiCl-ethanol solution with a Cu dummy layer, which was deposited on the inside wall of the pipe by electroless plating previously. The batch fabrication method can simplify the assembly of an active catheter, because the actuators are fabricated as a self-assembled unit. Keywords : shape memory alloy, pipe, actuator, non-planer, photo-fabrication.

AB - This paper reports a new photo-fabrication method of an actuator unit from a shape memory alloy (SMA) pipe. Three meandering actuators, which are linked one another, have been fabricated from an SMA pipe. The outer diameter and the wall thickness of the pipe are 600μm and 50μm, respectively. After the SMA pipe was dip coated with positive photoresist, the photoresist was patterned by using projection exposure method for an etching mask. The SMA pipe was electrochemically etched in the LiCl-ethanol solution with a Cu dummy layer, which was deposited on the inside wall of the pipe by electroless plating previously. The batch fabrication method can simplify the assembly of an active catheter, because the actuators are fabricated as a self-assembled unit. Keywords : shape memory alloy, pipe, actuator, non-planer, photo-fabrication.

KW - actuator

KW - non-planer

KW - photo-fabrication

KW - pipe

KW - shape memory alloy

UR - http://www.scopus.com/inward/record.url?scp=85009628825&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85009628825&partnerID=8YFLogxK

U2 - 10.1541/ieejsmas.123.158

DO - 10.1541/ieejsmas.123.158

M3 - Article

AN - SCOPUS:85009628825

VL - 123

SP - 158

EP - 162

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

SN - 1341-8939

IS - 5

ER -