Node supported varifocal mirror

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose and test a node supported varifocal mirror for high speed and large displacement actuation. The mirror diameter of fabricated device was 1 mm. The maximum quality factor was obtained at node supported condition. The resonant frequency and quality factor of the fabricated device were 391 kHz and 280 under the vacuum condition.

Original languageEnglish
Title of host publicationOMN 2019 - 2019 International Conference on Optical MEMS and Nanophotonics, Proceedings
PublisherIEEE Computer Society
Pages88-89
Number of pages2
ISBN (Electronic)9781728145013
DOIs
Publication statusPublished - 2019 Jul
Event2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019 - Daejeon, Korea, Republic of
Duration: 2019 Jul 282019 Aug 1

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume2019-July
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

Conference2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019
CountryKorea, Republic of
CityDaejeon
Period19/7/2819/8/1

Keywords

  • quality factor
  • Varifocal mirror

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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