NO and NO2 gas sensors based on surface photovoltage system fabricated by self-ordered mesoporous silicate film

Hao Shen Zhou, Takeo Yamada, Keisuke Asai, Itaru Honma, Hidekazu Uchida, Teruaki Katsube

Research output: Chapter in Book/Report/Conference proceedingChapter

3 Citations (Scopus)

Abstract

The first NO and NO2 gas sensors based on surface photo-voltage (SPV) semiconductor device system are fabricated by the metal/ SiO2 (self-ordered hexagonal mesoporous)- /Si3N4/SiO2/Si structure. Size controlled silicate hexagonal mesoporous film is successfully synthesized by spin coating on a Si3N4SiO2/Si silicon wafer using poly (ethylene oxide)-poly (propylene oxide)-poly (ethylene oxide) (Pluronic P123=EO20PO70EO20) triblock copolymers as a template. The characteristics of mesoporous film are investigated in XRD, TEM. The sensing properties of the self-ordered hexagonal mesoporous SPV system have been investigated by exposing to the NO or NO2 gas and air repeatedly. The changes of the average value and phase of the AC photocurrent (Iph) have been observed between the NO or NO2 gas and air. The response of the alternatively photocurrent is resulted from the physical adsorption and chemical interaction between detected NO or NO2 gas and the self-ordered hexagonal mesoporous film.

Original languageEnglish
Title of host publicationStudies in Surface Science and Catalysis
Pages623-630
Number of pages8
Volume141
DOIs
Publication statusPublished - 2002 Jan 1
Externally publishedYes

ASJC Scopus subject areas

  • Catalysis
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry
  • Surfaces, Coatings and Films
  • Materials Chemistry

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