Ni-FUSI on high-k as a candidate for 65nm LSTP CMOS

S. Kubicek, A. Veloso, K. G. Anil, S. Hayashi, K. Yamamoto, R. Mitsuhashi, A. Kittl, M. Lauwers, S. Van Dal, Horii, Y. Harada, M. Kubota, M. Niwa, S. De Gendt, M. Heyns, M. Jurczak, S. Biesemans

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science