New x-ray nanofocusing devices based on total-reflection zone plates

H. Takano, T. Tsujia, Y. Kagoshimaa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)


X-ray nanofocusing devices are capable of focusing X-rays down to sizes of about 10 nm. We have developed a new nanofocusing device, known as total-reflection zone plates (TRZPs), for focusing high-brilliance synchrotron radiation in the hard x-ray region. This device consists of a reflective zone pattern on a flat substrate. It has the potential to focus hard x-rays down to sub-10-nm dimensions. Furthermore, it is considerably easier to fabricate than other hard x-ray nanofocusing devices since it is used with a very small grazing incidence angle. We have focused 10-keV x-rays to sub-15 nm dimensions using a TRZP that was fabricated by conventional electron-beam lithography. In addition, we present designs for more efficient devices that have a target focus size of 5 nm. We propose and discuss a new approach for achieving point focusing with nanometer dimensions.

Original languageEnglish
Title of host publicationAdvances in X-Ray/EUV Optics and Components VI
Publication statusPublished - 2011
Externally publishedYes
EventAdvances in X-Ray/EUV Optics and Components VI - San Diego, CA, United States
Duration: 2011 Aug 222011 Aug 24

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherAdvances in X-Ray/EUV Optics and Components VI
Country/TerritoryUnited States
CitySan Diego, CA


  • Fresnel zone plate
  • Nanofocusing
  • Reflection zone plate
  • Synchrotron radiation
  • X-ray focusing device

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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