New transparent conductors anatase Ti1-xMxO 2 (M=Nb,Ta): Transport and optical properties

Yutaka Furubayashi, Taro Hitosugi, Yukio Yamamoto, Yasushi Hirose, Makoto Otani, Kiyomi Nakajima, Toyohiro Chikyow, Toshihiro Shimada, Tetsuya Hasegawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have discovered new transparent conducting oxides (TCOs), anatase Ti1-xMxO2 (M=Nb,Ta), in thin film form, Both films with 0.03 ≤ x ≤ 0.06 showed resistivity of 2-3 × 10 -4 Ωcm and internal transmittance of ∼95% in the visible light region (40 nm in thickness), at room temperature. These values are comparable to those of typical TCOs, such as In2-xSn xO3 (ITO).

Original languageEnglish
Title of host publicationMaterials for Transparent Electronics
PublisherMaterials Research Society
Pages13-18
Number of pages6
ISBN (Print)1558998608, 9781558998605
DOIs
Publication statusPublished - 2005
Event2005 MRS Fall Meeting - Boston, MA, United States
Duration: 2005 Nov 282005 Dec 2

Publication series

NameMaterials Research Society Symposium Proceedings
Volume905
ISSN (Print)0272-9172

Other

Other2005 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period05/11/2805/12/2

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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