New test structure for evaluation of extrinsic oxide breakdown

Katsuya Shiga, Junko Komori, Masafumi Katsumata, Akinobu Teramoto, Masahiro Sekine

Research output: Contribution to conferencePaperpeer-review

2 Citations (Scopus)

Abstract

A new test structure for evaluating extrinsic oxide breakdown is proposed. The active gate area which is needed to predict reliability will be shown. And by using this new test structure, activation energy not only for the intrinsic breakdown but also for the extrinsic breakdown are obtained.

Original languageEnglish
Pages197-200
Number of pages4
Publication statusPublished - 1998 Jan 1
Externally publishedYes
EventProceedings of the 1998 IEEE International Conference on Microelectronic Test Structures - Kanazawa, Jpn
Duration: 1998 Mar 231998 Mar 26

Other

OtherProceedings of the 1998 IEEE International Conference on Microelectronic Test Structures
CityKanazawa, Jpn
Period98/3/2398/3/26

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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