New test structure for evaluation of extrinsic oxide breakdown

Katsuya Shiga; Junko Komori; Masafumi Katsumata; Akinobu Teramoto; Masahiro Sekine

New test structure for evaluation of extrinsic oxide breakdown

Katsuya Shiga, Junko Komori, Masafumi Katsumata, Akinobu Teramoto, Masahiro Sekine

Research output: Contribution to conference › Paper › peer-review

Abstract

A new test structure for evaluating extrinsic oxide breakdown is proposed. The active gate area which is needed to predict reliability will be shown. And by using this new test structure, activation energy not only for the intrinsic breakdown but also for the extrinsic breakdown are obtained.

Original language	English
Pages	197-200
Number of pages	4
Publication status	Published - 1998 Jan 1
Externally published	Yes
Event	Proceedings of the 1998 IEEE International Conference on Microelectronic Test Structures - Kanazawa, Jpn Duration: 1998 Mar 23 → 1998 Mar 26

Other

Other	Proceedings of the 1998 IEEE International Conference on Microelectronic Test Structures
City	Kanazawa, Jpn
Period	98/3/23 → 98/3/26

ASJC Scopus subject areas

Electrical and Electronic Engineering

Access to Document

Fingerprint Dive into the research topics of 'New test structure for evaluation of extrinsic oxide breakdown'. Together they form a unique fingerprint.

Cite this

@conference{71385bef3fe34ddb9d5dba8391c9ca7f,

title = "New test structure for evaluation of extrinsic oxide breakdown",

abstract = "A new test structure for evaluating extrinsic oxide breakdown is proposed. The active gate area which is needed to predict reliability will be shown. And by using this new test structure, activation energy not only for the intrinsic breakdown but also for the extrinsic breakdown are obtained.",

author = "Katsuya Shiga and Junko Komori and Masafumi Katsumata and Akinobu Teramoto and Masahiro Sekine",

year = "1998",

month = jan,

day = "1",

language = "English",

pages = "197--200",

note = "Proceedings of the 1998 IEEE International Conference on Microelectronic Test Structures ; Conference date: 23-03-1998 Through 26-03-1998",

}

TY - CONF

T1 - New test structure for evaluation of extrinsic oxide breakdown

AU - Shiga, Katsuya

AU - Komori, Junko

AU - Katsumata, Masafumi

AU - Teramoto, Akinobu

AU - Sekine, Masahiro

PY - 1998/1/1

Y1 - 1998/1/1

N2 - A new test structure for evaluating extrinsic oxide breakdown is proposed. The active gate area which is needed to predict reliability will be shown. And by using this new test structure, activation energy not only for the intrinsic breakdown but also for the extrinsic breakdown are obtained.

AB - A new test structure for evaluating extrinsic oxide breakdown is proposed. The active gate area which is needed to predict reliability will be shown. And by using this new test structure, activation energy not only for the intrinsic breakdown but also for the extrinsic breakdown are obtained.

UR - http://www.scopus.com/inward/record.url?scp=0031644764&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031644764&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:0031644764

SP - 197

EP - 200

T2 - Proceedings of the 1998 IEEE International Conference on Microelectronic Test Structures

Y2 - 23 March 1998 through 26 March 1998

ER -