New spectrometric method for determination of sputtering parameters in glow discharge plasmas—use of helium matrix plasma gas

Kazuaki Wagatsuma, Kichinosuke Hirokawa

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

In Grimm‐type glow discharge spectrometry, a simple experimental method employing a helium–matrix plasma gas containing several per cent argon is developed to estimate the sputtering yield ratio of the constituents in single‐phase binary alloys. Whereas the voltage–current characteristics of the pure argon plasma strongly depend upon the kind of cathode material, those of the plasma using the mixture gas are almost the same, independent of the alloy composition of the samples. Emission spectra from this plasma source can be excited under similar excitation conditions and thus the observed emission intensities are determined principally by the number of sputtered atoms entering the plasma. The sputtering yield ratios in copper–nickel and nickel–cobalt binary alloys are estimated from analysing variations in the emission intensities with the alloy compositions. The yield ratios obtained correspond well with the values reported in previous works.

Original languageEnglish
Pages (from-to)631-636
Number of pages6
JournalSurface and Interface Analysis
Volume21
Issue number9
DOIs
Publication statusPublished - 1994 Sep

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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