Fingerprint
Dive into the research topics of 'New radical-control method for SiO2 etching with non-perfluorocompound gas chemistries'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
New radical-control method for SiO2 etching with non-perfluorocompound gas chemistries
Seiji Samukawa, Ken Ichiro Tsuda
Research output: Contribution to journal › Article › peer-review
24
Citations
(Scopus)