As-grown KNbO3 films deposited on STO (SrTiO3) substrates using MOCVD techniques are sufficiently piezoelectric for SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and λ/h = 0.24 (λ: SAW wavelength, h: film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.
|Number of pages||4|
|Journal||Proceedings of the IEEE Ultrasonics Symposium|
|Publication status||Published - 1998 Dec 1|
|Event||Proceedings of the 1998 International Ultrasonics Symposium - Sendai, Miyagi, Jpn|
Duration: 1998 Oct 5 → 1998 Oct 8
ASJC Scopus subject areas
- Acoustics and Ultrasonics