New piezoelectric KNbO3 films for SAW device applications

Kazuhiko Yamanouchi, Hiroyuki Odagawa, Toshiyuki Kojima, Yasuo Cho

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

Abstract

As-grown KNbO3 films deposited on STO (SrTiO3) substrates using MOCVD techniques are sufficiently piezoelectric for SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and λ/h = 0.24 (λ: SAW wavelength, h: film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.

Original languageEnglish
Pages (from-to)203-206
Number of pages4
JournalProceedings of the IEEE Ultrasonics Symposium
Volume1
Publication statusPublished - 1998 Dec 1
EventProceedings of the 1998 International Ultrasonics Symposium - Sendai, Miyagi, Jpn
Duration: 1998 Oct 51998 Oct 8

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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