New piezoelectric KNbO3 films for SAW device applications

Kazuhiko Yamanouchi; Hiroyuki Odagawa; Toshiyuki Kojima; Yasuo Cho

New piezoelectric KNbO₃ films for SAW device applications

Kazuhiko Yamanouchi, Hiroyuki Odagawa, Toshiyuki Kojima, Yasuo Cho

Information Devices Division

Research output: Contribution to journal › Conference article › peer-review

1 Citation (Scopus)

Abstract

As-grown KNbO₃ films deposited on STO (SrTiO₃) substrates using MOCVD techniques are sufficiently piezoelectric for SAW devices. The experimental results show the electromechanical coupling coefficients (K²) of 0.021 at the center frequency of 960 MHz and λ/h = 0.24 (λ: SAW wavelength, h: film thickness of KNbO₃). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.

Original language	English
Pages (from-to)	203-206
Number of pages	4
Journal	Proceedings of the IEEE Ultrasonics Symposium
Volume	1
Publication status	Published - 1998 Dec 1
Event	Proceedings of the 1998 International Ultrasonics Symposium - Sendai, Miyagi, Jpn Duration: 1998 Oct 5 → 1998 Oct 8

ASJC Scopus subject areas

Acoustics and Ultrasonics

Cite this

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title = "New piezoelectric KNbO3 films for SAW device applications",

abstract = "As-grown KNbO3 films deposited on STO (SrTiO3) substrates using MOCVD techniques are sufficiently piezoelectric for SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and λ/h = 0.24 (λ: SAW wavelength, h: film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.",

author = "Kazuhiko Yamanouchi and Hiroyuki Odagawa and Toshiyuki Kojima and Yasuo Cho",

year = "1998",

month = dec,

day = "1",

language = "English",

volume = "1",

pages = "203--206",

journal = "Proceedings - IEEE Ultrasonics Symposium",

issn = "1051-0117",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "Proceedings of the 1998 International Ultrasonics Symposium ; Conference date: 05-10-1998 Through 08-10-1998",

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TY - JOUR

T1 - New piezoelectric KNbO3 films for SAW device applications

AU - Yamanouchi, Kazuhiko

AU - Odagawa, Hiroyuki

AU - Kojima, Toshiyuki

AU - Cho, Yasuo

PY - 1998/12/1

Y1 - 1998/12/1

N2 - As-grown KNbO3 films deposited on STO (SrTiO3) substrates using MOCVD techniques are sufficiently piezoelectric for SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and λ/h = 0.24 (λ: SAW wavelength, h: film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.

AB - As-grown KNbO3 films deposited on STO (SrTiO3) substrates using MOCVD techniques are sufficiently piezoelectric for SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and λ/h = 0.24 (λ: SAW wavelength, h: film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.

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M3 - Conference article

AN - SCOPUS:0032262056

VL - 1

SP - 203

EP - 206

JO - Proceedings - IEEE Ultrasonics Symposium

JF - Proceedings - IEEE Ultrasonics Symposium

SN - 1051-0117

T2 - Proceedings of the 1998 International Ultrasonics Symposium

Y2 - 5 October 1998 through 8 October 1998

ER -

New piezoelectric KNbO₃ films for SAW device applications

Abstract

ASJC Scopus subject areas

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