New piezoelectric KNbO3 films for SAW device applications

K. Yamanouchi, H. Odagawa, T. Kojima, Yasuo Cho

Research output: Contribution to conferencePaperpeer-review

1 Citation (Scopus)

Abstract

KNbO3 films have been deposited on STO (SrTiO3) substrates using MOCVD techniques. The as-grown films are sufficiently piezoelectric to fabricate SAW devices. The experimental results show the electromechanical coupling coefficients (K2) of 0.021 at the center frequency of 960 MHz and h/λ = 0.24 (λ:SAW wavelength, h:film thickness of KNbO3). These values have fairly good agreements with theoretical ones calculated by using the piezoelectric constants of single crystals.

Original languageEnglish
Pages385-388
Number of pages4
Publication statusPublished - 1998 Dec 1
EventProceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI) - Montreaux, Switz
Duration: 1998 Aug 241998 Aug 27

Other

OtherProceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI)
CityMontreaux, Switz
Period98/8/2498/8/27

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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