New phases of sp3-bonded boron nitride prepared by photo-assisted plasma processing methods: The fundamentals and applications to electronic devices

Shojiro Komatsu, Kazuaki Kobayashi, Takahiro Nagata, Toyohiro Chikyo

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

New sp3-bonded polytypic forms of BN, namely, 6H-BN and 30H-BN were prepared by plasma-assisted chemical vapor deposition (CVD) with an excimer laser at 193 nm being irradiated on the growing film surface. Only the 6H-BN was formed by post-deposition laser irradiation (PDL) of sp2-bonded BN precursor films prepared by plain plasma assisted CVD. The PDL demonstrated direct photo-induced phase transformation from sp2-bonded BN into denser sp3-bonded BN here. The growth mechanism was discussed with regard to the "bond-strength initiative rule", according to which the local thermodynamics at very early stage of growth should favor the formation of the strongest bond available (e.g. sp2-hybridiz ed bonds in BN). P-type sp3-bonded BN/n-type Si heterodiode solar cell was fabricated by this method and proved to work efficiently.

Original languageEnglish
Title of host publicationInternational Conference on Advances in Condensed and Nano Materials, ICACNM-2011
Pages31-33
Number of pages3
DOIs
Publication statusPublished - 2011
EventInternational Conference on Advances in Condensed and Nano Materials, ICACNM-2011 - Chandigarh, India
Duration: 2011 Feb 232011 Feb 26

Publication series

NameAIP Conference Proceedings
Volume1393
ISSN (Print)0094-243X
ISSN (Electronic)1551-7616

Conference

ConferenceInternational Conference on Advances in Condensed and Nano Materials, ICACNM-2011
CountryIndia
CityChandigarh
Period11/2/2311/2/26

Keywords

  • CVD
  • component; BN
  • film
  • laser plasma
  • polytype
  • solar cell

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'New phases of sp<sup>3</sup>-bonded boron nitride prepared by photo-assisted plasma processing methods: The fundamentals and applications to electronic devices'. Together they form a unique fingerprint.

Cite this