New nondestructive evaluation method for surface acoustic wave velocity

Chunyun Jian, Atsushi Tsuboi, Satoshi Uda

Research output: Contribution to journalArticle

Abstract

A new nondestructive evaluation method for surface acoustic wave (SAW) velocity on a piezoelectric wafer was proposed. Split electrodes were formed on a glass wafer and a nonconductive liquid was interposed between the piezoelectric wafer and the glass wafer. The mode of the SAW excited on the piezoelectric wafer surface was leaky (LSAW) and its velocity was evaluated using the electrical reflection characteristics of the split electrodes. The usefulness of the new method was experimentally proven by showing the high reproducibility of the measured velocity and the agreement between the measured and calculated values indicating the SAW characteristics on a rotated-Y langasite wafer.

Original languageEnglish
Pages (from-to)5629-5631
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume39
Issue number9 B
Publication statusPublished - 2000 Sep 1
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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