A hot-wall-type metalorganic chemical vapor deposition (MOCVD) apparatus combined with a cryocooled superconducting magnet was recently developed. This system allows the application of magnetic fields up to 11 T for the MOCVD process. After making various improvements, we succeeded in fabricating YBa2Cu3O7 (YBCO) films under optimal deposition conditions. It is found that the crystallinity of YBCO films produced on polycrystalline silver substrates by the magnetic-field-assisted CVD process is improved as compared with those without the magnetic field.
|Journal||Japanese Journal of Applied Physics, Part 2: Letters|
|Publication status||Published - 2000|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)