New insights into selected-area deposition of diamond films by means of selective seeding

Hongwu Liu; Chengxin Wang; Chunxiao Gao; Yonghao Han; Jifeng Luo; Guangtian Zou; Chao Wen

doi:10.1088/0953-8984/14/44/412

New insights into selected-area deposition of diamond films by means of selective seeding

Hongwu Liu, Chengxin Wang, Chunxiao Gao, Yonghao Han, Jifeng Luo, Guangtian Zou, Chao Wen

SCI - Physics

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

Polycrystalline diamond films have been patterned on a polished Si substrate by means of selective seeding via hot-filament chemical vapour deposition. In addition to the process of selective seeding, the CH₄/H₂ concentration and the sizes of the patterns have effects on the selectivity. The mechanism of selective growth of diamond is also discussed in this paper.

Original language	English
Pages (from-to)	10973-10977
Number of pages	5
Journal	Journal of Physics Condensed Matter
Volume	14
Issue number	44 SPEC ISS.
DOIs	https://doi.org/10.1088/0953-8984/14/44/412
Publication status	Published - 2002 Nov 11

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics

Access to Document

10.1088/0953-8984/14/44/412

Cite this

@article{72fc4394ae9b4a06ba4a90080344c4b8,

title = "New insights into selected-area deposition of diamond films by means of selective seeding",

abstract = "Polycrystalline diamond films have been patterned on a polished Si substrate by means of selective seeding via hot-filament chemical vapour deposition. In addition to the process of selective seeding, the CH4/H2 concentration and the sizes of the patterns have effects on the selectivity. The mechanism of selective growth of diamond is also discussed in this paper.",

author = "Hongwu Liu and Chengxin Wang and Chunxiao Gao and Yonghao Han and Jifeng Luo and Guangtian Zou and Chao Wen",

year = "2002",

month = nov,

day = "11",

doi = "10.1088/0953-8984/14/44/412",

language = "English",

volume = "14",

pages = "10973--10977",

journal = "Journal of Physics Condensed Matter",

issn = "0953-8984",

publisher = "IOP Publishing Ltd.",

number = "44 SPEC ISS.",

}

TY - JOUR

T1 - New insights into selected-area deposition of diamond films by means of selective seeding

AU - Liu, Hongwu

AU - Wang, Chengxin

AU - Gao, Chunxiao

AU - Han, Yonghao

AU - Luo, Jifeng

AU - Zou, Guangtian

AU - Wen, Chao

PY - 2002/11/11

Y1 - 2002/11/11

N2 - Polycrystalline diamond films have been patterned on a polished Si substrate by means of selective seeding via hot-filament chemical vapour deposition. In addition to the process of selective seeding, the CH4/H2 concentration and the sizes of the patterns have effects on the selectivity. The mechanism of selective growth of diamond is also discussed in this paper.

AB - Polycrystalline diamond films have been patterned on a polished Si substrate by means of selective seeding via hot-filament chemical vapour deposition. In addition to the process of selective seeding, the CH4/H2 concentration and the sizes of the patterns have effects on the selectivity. The mechanism of selective growth of diamond is also discussed in this paper.

UR - http://www.scopus.com/inward/record.url?scp=0037064751&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0037064751&partnerID=8YFLogxK

U2 - 10.1088/0953-8984/14/44/412

DO - 10.1088/0953-8984/14/44/412

M3 - Article

AN - SCOPUS:0037064751

SN - 0953-8984

VL - 14

SP - 10973

EP - 10977

JO - Journal of Physics Condensed Matter

JF - Journal of Physics Condensed Matter

IS - 44 SPEC ISS.

ER -

New insights into selected-area deposition of diamond films by means of selective seeding

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this