New insights into selected-area deposition of diamond films by means of selective seeding

Hongwu Liu, Chengxin Wang, Chunxiao Gao, Yonghao Han, Jifeng Luo, Guangtian Zou, Chao Wen

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

Polycrystalline diamond films have been patterned on a polished Si substrate by means of selective seeding via hot-filament chemical vapour deposition. In addition to the process of selective seeding, the CH4/H2 concentration and the sizes of the patterns have effects on the selectivity. The mechanism of selective growth of diamond is also discussed in this paper.

Original languageEnglish
Pages (from-to)10973-10977
Number of pages5
JournalJournal of Physics Condensed Matter
Volume14
Issue number44 SPEC ISS.
DOIs
Publication statusPublished - 2002 Nov 11

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'New insights into selected-area deposition of diamond films by means of selective seeding'. Together they form a unique fingerprint.

Cite this