New functions of scanning nonlinear dielectric microscopy - Higher-order measurement and vertical resolution

Y. Cho, K. Ohara, A. Koike, H. Odagawa

Research output: Contribution to journalArticle

15 Citations (Scopus)

Abstract

We investigated new features (functions) of scanning nonlinear dielectric microscopy (SNDM), namely, higher-order nonlinear dielectric imaging and the very high vertical resolution. The resolution of the higher-order nonlinear dielectric imaging is higher than that of the conventional nonlinear dielectric imaging which detects the lowest order of the nonlinear dielectric constant. The very high vertical resolution of SNDM is also reported. These features of the SNDM enable us to obtain a new microscopy for measuring the topography or a new displacement sensor with extremely high sensitivity.

Original languageEnglish
Pages (from-to)3544-3548
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume40
Issue number5 B
DOIs
Publication statusPublished - 2001 May

Keywords

  • Nonlinear dielectric constant
  • Scanning nonlinear dielectric microscopy
  • Scanning probe microscopy

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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