We present the phase-mode circuits based on new fabrication process elements for highdensity circuit integration. Nb/AlNx/Nb overdamped junctions without external resistive shunts are applied to the phase-mode circuits. The area of a bias feed resistor can be reduced by a replacement of the metallic resistor by the junction normal resistance. As a miniaturization method of an inductance, the effective inductance of a Josephson junction is used. The phase-mode circuits based on these new integration methods have been fabricated by Nb integration technology. Various aspects which are brought about by these fabrication technologies are discussed.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering