New fabrication process elements of phase-mode logic circuits

T. Onomi; K. Nakajima

doi:10.1109/77.783739

New fabrication process elements of phase-mode logic circuits

T. Onomi, K. Nakajima

Research Institute of Electrical Communication (RIEC)

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

We present the phase-mode circuits based on new fabrication process elements for highdensity circuit integration. Nb/AlN_x/Nb overdamped junctions without external resistive shunts are applied to the phase-mode circuits. The area of a bias feed resistor can be reduced by a replacement of the metallic resistor by the junction normal resistance. As a miniaturization method of an inductance, the effective inductance of a Josephson junction is used. The phase-mode circuits based on these new integration methods have been fabricated by Nb integration technology. Various aspects which are brought about by these fabrication technologies are discussed.

Original language	English
Pages (from-to)	3318-3321
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	9
Issue number	2 PART 3
DOIs	https://doi.org/10.1109/77.783739
Publication status	Published - 1999

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/77.783739

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AB - We present the phase-mode circuits based on new fabrication process elements for highdensity circuit integration. Nb/AlNx/Nb overdamped junctions without external resistive shunts are applied to the phase-mode circuits. The area of a bias feed resistor can be reduced by a replacement of the metallic resistor by the junction normal resistance. As a miniaturization method of an inductance, the effective inductance of a Josephson junction is used. The phase-mode circuits based on these new integration methods have been fabricated by Nb integration technology. Various aspects which are brought about by these fabrication technologies are discussed.

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New fabrication process elements of phase-mode logic circuits

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