Abstract
We present the phase-mode circuits based on new fabrication process elements for highdensity circuit integration. Nb/AlNx/Nb overdamped junctions without external resistive shunts are applied to the phase-mode circuits. The area of a bias feed resistor can be reduced by a replacement of the metallic resistor by the junction normal resistance. As a miniaturization method of an inductance, the effective inductance of a Josephson junction is used. The phase-mode circuits based on these new integration methods have been fabricated by Nb integration technology. Various aspects which are brought about by these fabrication technologies are discussed.
Original language | English |
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Pages (from-to) | 3318-3321 |
Number of pages | 4 |
Journal | IEEE Transactions on Applied Superconductivity |
Volume | 9 |
Issue number | 2 PART 3 |
DOIs | |
Publication status | Published - 1999 |
Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering