New era of silicon technologies due to radical reaction based semiconductor manufacturing

Tadahiro Ohmi, Masaki Hirayama, Akinobu Teramoto

Research output: Contribution to journalArticlepeer-review

98 Citations (Scopus)

Fingerprint

Dive into the research topics of 'New era of silicon technologies due to radical reaction based semiconductor manufacturing'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds