New concept of TSV formation methodology using Directed Self-Assembly (DSA)

Takafumi Fukushima, Mariappan Murugesan, Shin Ohsaki, Hiroyuki Hashimoto, Jichoel Bea, Kanuku Ri, Tetsu Tanaka, Mitsumasa Koyanagi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Fingerprint Dive into the research topics of 'New concept of TSV formation methodology using Directed Self-Assembly (DSA)'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science