New approaches to fabrication of multilayer Fresnel zone plate for high-energy synchrotron radiation X-rays

Shigeharu Tamura, Masato Yasumoto, Nagao Kamijo, Yoshio Suzuki, Mitsuhiro Awaji, Akihisa Takeuchi, Kentaro Uesugi, Yasuko Terada, Hidekazu Takano

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


A multilayer (sputtered-sliced) Fresnel zone plate (FZP) is one of the promising focusing optics with high spatial resolution for the high-energy X-ray region. This is because a large "aspect ratio" can be realized easily. In addition, it is important that the kinoform FZP (theoretical diffraction efficiency=100%) can be fabricated by the sputtered-sliced method. This paper presents the experimental results of two new approaches for fabrication of a multilayer FZP for X-rays. (1) To achieve higher diffraction efficiency, a multilevel-type (4-step: quasi-kinoform type) FZP was fabricated. This FZP was composed of concentric multilayers of alternating high-Z, low-Z, and composite materials. The composite material layer was deposited by co-sputtering of high-Z and low-Z materials. (2) To achieve smoother zones (multilayer interfaces) at the conventional-type FZP, each target of a sputtering apparatus with two DC-sputtering guns was surrounded by a cover with an aperture, and Ar gas was supplied inside the cover, which led to the deposition at lower Ar gas pressure. As a result, for the former, the efficiency was improved markedly as compared with conventional FZP, and for the latter, the zone roughness was reduced, which has resulted in the improvement of the spatial resolution of the FZP.

Original languageEnglish
Pages (from-to)823-827
Number of pages5
Issue number7 SPEC. ISS.
Publication statusPublished - 2006 May 31
Externally publishedYes


  • Diffraction efficiency
  • Multilayer zone plate
  • Sputtering
  • X-ray
  • Zone plate

ASJC Scopus subject areas

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films


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