New amorphous alloys as micromaterials and the processing technologies

Yasunori Saotome, Akihisa Inoue

Research output: Contribution to conferencePaperpeer-review

20 Citations (Scopus)

Abstract

Microformability of new amorphous alloys in the supercooled liquid state and microforming techniques for the materials are shown. In the supercooled liquid state, the materials reveal perfect Newtonian viscous flow characteristics and furthermore exhibit an excellent property of microformability on a submicron scale. Microforming techniques are shown as follows; microextrusion with micro-dies made of photochemically machinable glass and made of laser-micromachined polyimide, submicron imprinting with silicon die fabricated by EB lithography and etching, microforging of microgear of 10 μm in module with microdie fabricated by UV-LIGA process. As a result, the materials are expected to become some of the most useful materials for fabricating MEMS.

Original languageEnglish
Pages288-293
Number of pages6
Publication statusPublished - 2000 Jan 1
Event13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000) - Miyazaki, Jpn
Duration: 2000 Jan 232000 Jan 27

Other

Other13th Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000)
CityMiyazaki, Jpn
Period00/1/2300/1/27

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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