Neutralization by a corona discharge ionizer in nitrogen atmosphere

Toru Ikeuchi; Kazunori Takahashi; Takahiro Ohkubo; Tamiya Fujiwara

doi:10.1541/ieejfms.129.146

Neutralization by a corona discharge ionizer in nitrogen atmosphere

Toru Ikeuchi, Kazunori Takahashi, Takahiro Ohkubo, Tamiya Fujiwara

Research output: Contribution to journal › Article › peer-review

Abstract

An electrostatic neutralization of multilayer-loading silicon wafers is demonstrated using a corona discharge ionizer in nitrogen atmosphere, where ac and dc voltages are applied to two needle electrodes for generation of the negative- and positive-charged particles, respectively. We observe a surface potential of the silicon wafer decreases from ±lkV to ±20V within three seconds. Moreover, the density profiles of the charged particles generated by the electrodes are experimentally and theoretically investigated in nitrogen and air atmospheres. Our results show the possibility that the negative-charged particles contributing to the electrostatic neutralization are electrons and negative ions in nitrogen and air atmospheres, respectively.

Original language	English
Pages (from-to)	146-152+5
Journal	IEEJ Transactions on Fundamentals and Materials
Volume	129
Issue number	3
DOIs	https://doi.org/10.1541/ieejfms.129.146
Publication status	Published - 2009 Apr 30
Externally published	Yes

Keywords

Charged-particle distribution
Corona discharge
Electrostatic neutralization
Ionizer

ASJC Scopus subject areas

Electrical and Electronic Engineering

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title = "Neutralization by a corona discharge ionizer in nitrogen atmosphere",

abstract = "An electrostatic neutralization of multilayer-loading silicon wafers is demonstrated using a corona discharge ionizer in nitrogen atmosphere, where ac and dc voltages are applied to two needle electrodes for generation of the negative- and positive-charged particles, respectively. We observe a surface potential of the silicon wafer decreases from ±lkV to ±20V within three seconds. Moreover, the density profiles of the charged particles generated by the electrodes are experimentally and theoretically investigated in nitrogen and air atmospheres. Our results show the possibility that the negative-charged particles contributing to the electrostatic neutralization are electrons and negative ions in nitrogen and air atmospheres, respectively.",

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T1 - Neutralization by a corona discharge ionizer in nitrogen atmosphere

AU - Ikeuchi, Toru

AU - Takahashi, Kazunori

AU - Ohkubo, Takahiro

AU - Fujiwara, Tamiya

PY - 2009/4/30

Y1 - 2009/4/30

N2 - An electrostatic neutralization of multilayer-loading silicon wafers is demonstrated using a corona discharge ionizer in nitrogen atmosphere, where ac and dc voltages are applied to two needle electrodes for generation of the negative- and positive-charged particles, respectively. We observe a surface potential of the silicon wafer decreases from ±lkV to ±20V within three seconds. Moreover, the density profiles of the charged particles generated by the electrodes are experimentally and theoretically investigated in nitrogen and air atmospheres. Our results show the possibility that the negative-charged particles contributing to the electrostatic neutralization are electrons and negative ions in nitrogen and air atmospheres, respectively.

AB - An electrostatic neutralization of multilayer-loading silicon wafers is demonstrated using a corona discharge ionizer in nitrogen atmosphere, where ac and dc voltages are applied to two needle electrodes for generation of the negative- and positive-charged particles, respectively. We observe a surface potential of the silicon wafer decreases from ±lkV to ±20V within three seconds. Moreover, the density profiles of the charged particles generated by the electrodes are experimentally and theoretically investigated in nitrogen and air atmospheres. Our results show the possibility that the negative-charged particles contributing to the electrostatic neutralization are electrons and negative ions in nitrogen and air atmospheres, respectively.

KW - Charged-particle distribution

KW - Corona discharge

KW - Electrostatic neutralization

KW - Ionizer

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