Neutralization by a corona discharge ionizer in nitrogen atmosphere

Toru Ikeuchi, Kazunori Takahashi, Takahiro Ohkubo, Tamiya Fujiwara

Research output: Contribution to journalArticlepeer-review

Abstract

An electrostatic neutralization of multilayer-loading silicon wafers is demonstrated using a corona discharge ionizer in nitrogen atmosphere, where ac and dc voltages are applied to two needle electrodes for generation of the negative- and positive-charged particles, respectively. We observe a surface potential of the silicon wafer decreases from ±lkV to ±20V within three seconds. Moreover, the density profiles of the charged particles generated by the electrodes are experimentally and theoretically investigated in nitrogen and air atmospheres. Our results show the possibility that the negative-charged particles contributing to the electrostatic neutralization are electrons and negative ions in nitrogen and air atmospheres, respectively.

Original languageEnglish
Pages (from-to)146-152+5
JournalIEEJ Transactions on Fundamentals and Materials
Volume129
Issue number3
DOIs
Publication statusPublished - 2009 Apr 30
Externally publishedYes

Keywords

  • Charged-particle distribution
  • Corona discharge
  • Electrostatic neutralization
  • Ionizer

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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