Neutralization by a corona discharge ionizer in nitrogen atmosphere

Toru Ikeuchi, Kazunori Takahashi, Takahiro Ohkubo, Tamiya Fujiwara

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

Electrostatic neutralization of multilayer-loading silicon wafers is demonstrated using a corona discharge ionizer in a nitrogen atmosphere, where AC and DC voltages are applied to two needle electrodes for generation of negative- and positive-charged particles, respectively. We observe that the surface potential of the silicon wafer decreases from ±1 kV to ±20 V within 3 seconds. The density profiles of the charged particles generated by the electrodes are experimentally and theoretically investigated in nitrogen and air atmospheres. Our results show the possibility that the negative-charged particles contributing to the electrostatic neutralization are electrons and negative ions in nitrogen and air atmospheres, respectively.

Original languageEnglish
Pages (from-to)1-8
Number of pages8
JournalElectrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi)
Volume177
Issue number3
DOIs
Publication statusPublished - 2011 Nov 30
Externally publishedYes

Keywords

  • charged particle distribution
  • corona discharge
  • electrostatic neutralization
  • ionizer

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

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