Neutral beam technology for damage-free etching processes

Research output: Contribution to conferencePaperpeer-review

Abstract

Advances in plasma process technology have contributed directly to advances in the miniaturization and integration of semiconductor devices. However, in semiconductor devices that encroach on the nanoscale domain, defects or damage can be caused by charged particles and ultraviolet rays emitted from the plasma, severely impairing the characteristics of nano-devices that have a larger surface than bulk areas. It is therefore essential to develop a method for suppressing or controlling charge accumulation and ultraviolet damage in plasma processing. The neutral beam process developed by the author is a method that suppresses the formation of defects at the atomic layer level in the processed surface, allowing ideal surface chemical reactions to take place at room temperature. This technique is indispensable to develop future innovative nano-devices. We are using this technique to develop future innovative nanodevices, such as high speed GaN HEMT and InGaN LED.

Original languageEnglish
Publication statusPublished - 2018
Event2018 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2018 - Austin, United States
Duration: 2018 May 72018 May 10

Other

Other2018 International Conference on Compound Semiconductor Manufacturing Technology, CS MANTECH 2018
CountryUnited States
CityAustin
Period18/5/718/5/10

Keywords

  • Defect-free
  • GaN HEMT
  • InGaN LED
  • Neutral Beam Process
  • Plasma Induced damages

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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