Neutral beam technology-defect-free nanofabrication for novel nano-materials and nano-devices

Physics

• Defects 100%
• Neutral Beams 66%
• Semiconductor Device 66%
• Room Temperature 33%
• Nanoscale 33%
• Nanomaterial 33%
• Nanofabrication 33%
• Process Technology 33%
• Area 33%
• Domains 33%
• Technology 33%
• Accumulations 33%
• Chemical Reaction 33%
• Miniaturization 33%

Engineering

• Defects 100%
• Plasma Process 100%
• Surfaces 66%
• Room Temperature 33%
• Nanomaterial 33%
• Miniaturization 33%
• Nanoscale 33%
• Atomic Layer 33%
• Plasma Applications 33%
• Integration 33%
• Characteristics 33%
• Large Surface 33%

Material Science

• Devices 100%
• Defect 100%
• Surface 66%