@inproceedings{2569c65bfd2e4d808a43da8fd0c21f88,
title = "Neutral beam technology - Defect-free nanofabrication for novel nanomaterials and nanodevices",
abstract = "Ultra-low-damage nanofabrication techniques using neutral beam technology that taps into the essential nature of nanomaterials and nanostructures are actively developing for innovative nanodevices.",
keywords = "Defect Control, Deposition, Etching, Nanodevices, Neutral Bema Technology, Surface Modification",
author = "Seiji Samukawa",
year = "2014",
month = jan,
day = "1",
doi = "10.1109/ISNE.2014.6839390",
language = "English",
isbn = "9781479947805",
series = "2014 International Symposium on Next-Generation Electronics, ISNE 2014",
publisher = "IEEE Computer Society",
booktitle = "2014 International Symposium on Next-Generation Electronics, ISNE 2014",
note = "3rd International Symposium on Next-Generation Electronics, ISNE 2014 ; Conference date: 07-05-2014 Through 10-05-2014",
}