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Neutral beam etching for device isolation in AlGaN/GaN HEMTs
Fuyumi Hemmi, Cedric Thomas, Yi Chun Lai, Akio Higo, Alex Guo, Shireen Warnock, Jesús A. del Alamo, Seiji Samukawa, Taiichi Otsuji, Tetsuya Suemitsu
Research output: Contribution to journal › Article › peer-review
5
Citations
(Scopus)