Negligible substrate clamping effect on piezoelectric response in (111)-epitaxial tetragonal Pb(Zr, Ti)O3 films

Tomoaki Yamada, Jun Yasumoto, Daisuke Ito, Osami Sakata, Yasuhiko Imai, Takanori Kiguchi, Takahisa Shiraishi, Takao Shimizu, Hiroshi Funakubo, Masahito Yoshino, Takanori Nagasaki

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17 Citations (Scopus)

Abstract

The converse piezoelectric responses of (111)- and (001)-epitaxial tetragonal Pb(Zr0.35Ti0.65)O3 [PZT] films were compared to investigate the orientation dependence of the substrate clamping effect. Synchrotron X-ray diffraction (XRD) and piezoelectric force microscopy revealed that the as-grown (111)-PZT film has a polydomain structure with normal twin boundaries that are changed by the poling process to inclined boundaries, as predicted by Romanov et al. [Phys. Status Solidi A 172, 225 (1999)]. Time-resolved synchrotron XRD under bias voltage showed the negligible impact of substrate clamping on the piezoelectric response in the (111)-PZT film, unlike the case for (001)-PZT film. The origin of the negligible clamping effect in the (111)-PZT film is discussed from the viewpoint of the elastic properties and the compensation of lattice distortion between neighboring domains.

Original languageEnglish
Article number072012
JournalJournal of Applied Physics
Volume118
Issue number7
DOIs
Publication statusPublished - 2015 Aug 21

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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