Abstract
The formation of negative hydrogen ions is investigated in a pure hydrogen RF plasma using a grid-method ior electron temperature control. Using the grid method we produce both high and low electron temperature plasmas in the separated regions in the chamber, in which the electron temperature in the downstream region is controlled by the grid potential. The production rate of negative ions depends strongly on the grid potential. We observe efficient negative hydrogen ion production in the downstream region when the grid is negatively biased in the hydrogen pressure range of 2-5 mTorr.
| Original language | English |
|---|---|
| Pages (from-to) | 4551-4553 |
| Number of pages | 3 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 36 |
| Issue number | 7 SUPPL. B |
| DOIs | |
| Publication status | Published - 1997 Jul |
| Externally published | Yes |
Keywords
- Dissociative attachment
- Electron temperature control
- Negative hydrogen ions
- Negative ions
- RF plasma
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)