Negative hydrogen ions produced by electron temperature control in an RF plasma

Satoru Iizuka, Kohgi Kato, Akira Takahashi, Koji Nakagomi, Noriyoshi Sato

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

The formation of negative hydrogen ions is investigated in a pure hydrogen RF plasma using a grid-method ior electron temperature control. Using the grid method we produce both high and low electron temperature plasmas in the separated regions in the chamber, in which the electron temperature in the downstream region is controlled by the grid potential. The production rate of negative ions depends strongly on the grid potential. We observe efficient negative hydrogen ion production in the downstream region when the grid is negatively biased in the hydrogen pressure range of 2-5 mTorr.

Original languageEnglish
Pages (from-to)4551-4553
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume36
Issue number7 SUPPL. B
DOIs
Publication statusPublished - 1997 Jul

Keywords

  • Dissociative attachment
  • Electron temperature control
  • Negative hydrogen ions
  • Negative ions
  • RF plasma

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

Fingerprint Dive into the research topics of 'Negative hydrogen ions produced by electron temperature control in an RF plasma'. Together they form a unique fingerprint.

Cite this