Near-Zero TCF of HAL SAW Resonator with LiTaO 3 -on-Quartz Structure

Michio Kadota, Yoshimi Yunoki, Takehito Shimatsu, Miyuki Uomot, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

This paper reports the recent progress of a new type of hetero acoustic layer (HAL) surface acoustic wave (SAW) resonators using a 0.44 \text{to} 1.12 \mu \mathrm{m} thick rotated-Y LiTa03 (LT) plate and a near ST-cut quartz substrate. This material combination was selected, because quartz has a higher velocity of leaky SAW than LT and a positive temperature coefficient of frequency (TCF). An impedance ratio of 82 dB and a Bode Q of 3, 000 were obtained, and TCFs at series and parallel resonance were measured to be +2 and -10 ppm/PC, respectively. Compared with the characteristics of a standard 42°YX LT SAW resonator fabricated in the same facility, the impedance ratio is higher by 31 dB, the bode Q is 6.3 times higher, and the TCFs at series and parallel resonance are as small as 1/25 and 1/6, respectively.

Original languageEnglish
Title of host publicationIFCS 2018 - IEEE International Frequency Control Symposium
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781538632147
DOIs
Publication statusPublished - 2018 Dec 31
Event72nd Annual International Frequency Control Symposium, IFCS 2018 - Olympic Valley, United States
Duration: 2018 May 212018 May 24

Publication series

NameIFCS 2018 - IEEE International Frequency Control Symposium

Conference

Conference72nd Annual International Frequency Control Symposium, IFCS 2018
CountryUnited States
CityOlympic Valley
Period18/5/2118/5/24

Keywords

  • LiTa03
  • SAW resonator
  • TCF
  • bode Q
  • hetero acoustic layer
  • impedance ratio
  • quartz

ASJC Scopus subject areas

  • Computer Networks and Communications
  • Signal Processing
  • Control and Optimization
  • Instrumentation

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