Nanoscale patterning of protein using electron beam lithography of organosilane self-assembled monolayers

Guo Jun Zhang, Takashi Tanii, Tamotsu Zako, Takumi Hosaka, Takeo Miyuke, Yuzo Kanari, Takashi Funatsu, Iwao Ohdomari

    Research output: Contribution to journalArticlepeer-review

    80 Citations (Scopus)


    Nanopatterning of self-assembled monolayers (SAM) by electron beam lithography (EB) was developed to produce organic templates for various nanofabrication processes. EB lithography of SAMs provide a method of patterning substrates with proteins with ultrahigh resolution down to sub-10 nm on the scale of single molecule. Green fluorescent proteins (GFP), which is a spontaneous fluorescence protein isolated from the Pacific Jellyfish was chosen as a model protein. A cysteine residue at the c-terminal end of the protein by site-directed mutagenesis for the site specific modification of protein with biotin was introduced. Field-emission scanning electron microscopy was employed to observe nanostructures composed of two different types of organosilane layers. EB lithography of fluorinated SAM as an ideal template enables the high-resolution patterning of proteins with a high signal-to-noise ratio and integration of bioactive proteins into biosensors.

    Original languageEnglish
    Pages (from-to)833-837
    Number of pages5
    Issue number8-9
    Publication statusPublished - 2005 Aug


    • Biorecognition
    • Nanolithography
    • Patterning
    • Protein design
    • Self-assembled monolayers

    ASJC Scopus subject areas

    • Biotechnology
    • Biomaterials
    • Chemistry(all)
    • Materials Science(all)


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