Nanoscale nondestructive evaluation of materials and devices by ultrasonic atomic force microscopy

Kazushi Yamanaka, Toshihiro Tsuji, Hiroshi Irihama, Tsuyoshi Mihara

Research output: Contribution to journalConference articlepeer-review

5 Citations (Scopus)

Abstract

Two evaluation methods of nano-scale internal defects by ultrasonic atomic force microscopy (UAFM) is reviewed. The first one is a linear vibration analysis of the contact stiffness calculated from a finite element method analysis of a model including a subsurface gap. The second one is a nonlinear vibration analysis of a stiffening or softening spring representing the opening-and-closing behavior of the gap. These methods were verified by the resonance frequency mapping, the load dependence of the resonance frequency and the resonance spectra in UAFM on a subsurface gap in highly oriented pyrolytic graphite. It was proved that the proposed methods are useful for evaluating the crack closure/opening on the nano-scale.

Original languageEnglish
Pages (from-to)104-111
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5045
DOIs
Publication statusPublished - 2003 Nov 27
EventPROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Testing, Reliability, and Application of Micro- and Nano-Material Systems - San Diego, CA, United States
Duration: 2003 Mar 32003 Mar 5

Keywords

  • Linear vibration
  • Nano-scale crack
  • Nondestructive evaluation
  • Nonlinear vibration
  • Opening-and-closing behavior
  • Ultrasonic atomic force microscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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