Nanoprocessing and nanofabrication of a structured polymer film by the focused-ion-beam technique

Ken Ichi Niihara, Takeshi Kaneko, Toshiaki Suzuki, Yasuhiko Sato, Hideo Nishioka, Yukihiro Nishikawa, Toshio Nishi, Hiroshi Jinnai

Research output: Contribution to journalArticlepeer-review

36 Citations (Scopus)

Abstract

The focused-ion-beam (FIB) technique, a powerful tool for semiconductor-related processing, was used for the nanoprocessing and nanofabrication of a structured polymer film. The milling of poly(styrene-block-isoprene) (SI) copolymer ultrathin film, leaving the PVF substrate untouched, by choosing the milling depth was discussed. The SI diblock copolymer, a purely polymeric specimen without any kind of support such as Si substrate, was easily milled, at the cryotemperature. A FIB microscope was used for imaging and milling the block copolymer film. The channel made by the FIB milling had walls with G-type nanopatterns.

Original languageEnglish
Pages (from-to)3048-3050
Number of pages3
JournalMacromolecules
Volume38
Issue number8
DOIs
Publication statusPublished - 2005 Apr 19
Externally publishedYes

ASJC Scopus subject areas

  • Organic Chemistry
  • Polymers and Plastics
  • Inorganic Chemistry
  • Materials Chemistry

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