Nanoparticulated dense and stress-free ceramic thick film for material integration

Yoshihiko Imanaka; Hideyuki Amada; Fumiaki Kumasaka; Norihiko Takahashi; Takahiro Yamasaki; Mari Ohfuchi; Chioko Kaneta

doi:10.1002/adem.201300174

Nanoparticulated dense and stress-free ceramic thick film for material integration

Yoshihiko Imanaka, Hideyuki Amada, Fumiaki Kumasaka, Norihiko Takahashi, Takahiro Yamasaki, Mari Ohfuchi, Chioko Kaneta

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

A dense, thick, and organic-binder-free ceramic film consisting of stress-free nanoparticles could be obtained at room temperature by making use of the unstable and high-surface energy amorphous phase on the surface of particles. Photolithography and wet etching can be adapted to the thick ceramic green-state film. A multilayered structure consisting of various ceramics with different sintering temperatures and Cu wiring can form on a Cu foil below 1000 °C.

Original language	English
Pages (from-to)	1129-1135
Number of pages	7
Journal	Advanced Engineering Materials
Volume	15
Issue number	11
DOIs	https://doi.org/10.1002/adem.201300174
Publication status	Published - 2013 Nov
Externally published	Yes

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics

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10.1002/adem.201300174

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abstract = "A dense, thick, and organic-binder-free ceramic film consisting of stress-free nanoparticles could be obtained at room temperature by making use of the unstable and high-surface energy amorphous phase on the surface of particles. Photolithography and wet etching can be adapted to the thick ceramic green-state film. A multilayered structure consisting of various ceramics with different sintering temperatures and Cu wiring can form on a Cu foil below 1000 °C.",

author = "Yoshihiko Imanaka and Hideyuki Amada and Fumiaki Kumasaka and Norihiko Takahashi and Takahiro Yamasaki and Mari Ohfuchi and Chioko Kaneta",

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AU - Imanaka, Yoshihiko

AU - Amada, Hideyuki

AU - Kumasaka, Fumiaki

AU - Takahashi, Norihiko

AU - Yamasaki, Takahiro

AU - Ohfuchi, Mari

AU - Kaneta, Chioko

PY - 2013/11

Y1 - 2013/11

N2 - A dense, thick, and organic-binder-free ceramic film consisting of stress-free nanoparticles could be obtained at room temperature by making use of the unstable and high-surface energy amorphous phase on the surface of particles. Photolithography and wet etching can be adapted to the thick ceramic green-state film. A multilayered structure consisting of various ceramics with different sintering temperatures and Cu wiring can form on a Cu foil below 1000 °C.

AB - A dense, thick, and organic-binder-free ceramic film consisting of stress-free nanoparticles could be obtained at room temperature by making use of the unstable and high-surface energy amorphous phase on the surface of particles. Photolithography and wet etching can be adapted to the thick ceramic green-state film. A multilayered structure consisting of various ceramics with different sintering temperatures and Cu wiring can form on a Cu foil below 1000 °C.

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ER -

Nanoparticulated dense and stress-free ceramic thick film for material integration

Abstract

ASJC Scopus subject areas

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