A dense, thick, and organic-binder-free ceramic film consisting of stress-free nanoparticles could be obtained at room temperature by making use of the unstable and high-surface energy amorphous phase on the surface of particles. Photolithography and wet etching can be adapted to the thick ceramic green-state film. A multilayered structure consisting of various ceramics with different sintering temperatures and Cu wiring can form on a Cu foil below 1000 °C.
|Number of pages||7|
|Journal||Advanced Engineering Materials|
|Publication status||Published - 2013 Nov|
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics