Nanoparticulated dense and stress-free ceramic thick film for material integration

Yoshihiko Imanaka, Hideyuki Amada, Fumiaki Kumasaka, Norihiko Takahashi, Takahiro Yamasaki, Mari Ohfuchi, Chioko Kaneta

Research output: Contribution to journalArticlepeer-review

10 Citations (Scopus)

Abstract

A dense, thick, and organic-binder-free ceramic film consisting of stress-free nanoparticles could be obtained at room temperature by making use of the unstable and high-surface energy amorphous phase on the surface of particles. Photolithography and wet etching can be adapted to the thick ceramic green-state film. A multilayered structure consisting of various ceramics with different sintering temperatures and Cu wiring can form on a Cu foil below 1000 °C.

Original languageEnglish
Pages (from-to)1129-1135
Number of pages7
JournalAdvanced Engineering Materials
Volume15
Issue number11
DOIs
Publication statusPublished - 2013 Nov 1
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

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