Nanoparticles of metastable copper nitride grown by Ar ion beam irradiation

Ki Wan Jang, Shun Ichiro Tanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


Nanoparticles of metastable copper nitride(Cu3N) have been successfully fabricated from Cu mask using Ar ion 'transcription method' which is firstly invented by B.-S. Xu, C. Iwamoto and S.-I. Tanaka in 1996 [1]. The structural and morphological changes with irradiation time arc studied by transmission electron microscopy (TEM). The thin film-like crystalline Cu 3N which is covered with amorphous or polycrystalline cuprite (Cu2U) layer in the as-received Cu mask plays a role of target. Polycrystalline Cu3N nanoparticles nucleate and grow up to the average size of 15nm after 30 sec-irradiation. Coalesence of 50nm-sized grown Cu3N nanoparticles forms polycrystalline thin film after 2min-irradiation and its growth behavior follows Volmer-Weber mode. As irradiation time increases from 30 sec to 15 min, Cu3N nanoparticles are thought to be grown preferentially along the [111] and [100] directions. Cu2O still remain with Cu3N after 15 min.-irradiation.

Original languageEnglish
Title of host publicationAICAM 2005 - Proceedings of the Asian International Conference on Advanced Materials
PublisherTrans Tech Publications
Number of pages4
ISBN (Print)0878499792, 9780878499793
Publication statusPublished - 2006
EventAICAM 2005 - Asian International Conference on Advanced Materials - Beijing, China
Duration: 2005 Nov 32005 Nov 5

Publication series

NameAdvanced Materials Research
ISSN (Print)1022-6680


OtherAICAM 2005 - Asian International Conference on Advanced Materials


  • Arion beam irradiation
  • Copper nitride
  • Metastable
  • Nanoparticle
  • Transcription method
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Engineering(all)


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