Nanometrology of an ultraprecision machined surface by using optical sensors

Zengyuan Niu, Ryo Kobayashi, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents nanometrology of an ultraprecision machined surface by using optical sensors. To verify the feasibilities of optical sensors on the measurement of surface profile, different types of fiber-optic sensor and laser micro interferometer are employed to measure the roundness of a ultraprecision machined cone in this paper. Experiments confirmed that the fiber-optic sensor can measure not only the roundness but also the surface roughness of the cone. Experiments also confirm that the measurement of the laser micro interferometer is highly affected by the surface roughness of the cone because of the relative measurement principle of the laser micro interferometer.

Original languageEnglish
Title of host publication16th International Conference on Nanotechnology - IEEE NANO 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages984-985
Number of pages2
ISBN (Electronic)9781509039142
DOIs
Publication statusPublished - 2016 Nov 21
Event16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan
Duration: 2016 Aug 222016 Aug 25

Publication series

Name16th International Conference on Nanotechnology - IEEE NANO 2016

Other

Other16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
CountryJapan
CitySendai
Period16/8/2216/8/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

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  • Cite this

    Niu, Z., Kobayashi, R., Chen, Y. L., Shimizu, Y., Ito, S., & Gao, W. (2016). Nanometrology of an ultraprecision machined surface by using optical sensors. In 16th International Conference on Nanotechnology - IEEE NANO 2016 (pp. 984-985). [7751479] (16th International Conference on Nanotechnology - IEEE NANO 2016). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NANO.2016.7751479