Nanometrology of an ultraprecision machined surface by using optical sensors

Zengyuan Niu; Ryo Kobayashi; Yuanliu Chen; Yuki Shimizu; So Ito; Wei Gao

doi:10.1109/NANO.2016.7751479

Nanometrology of an ultraprecision machined surface by using optical sensors

Zengyuan Niu, Ryo Kobayashi, Yuanliu Chen, Yuki Shimizu, So Ito, Wei Gao

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents nanometrology of an ultraprecision machined surface by using optical sensors. To verify the feasibilities of optical sensors on the measurement of surface profile, different types of fiber-optic sensor and laser micro interferometer are employed to measure the roundness of a ultraprecision machined cone in this paper. Experiments confirmed that the fiber-optic sensor can measure not only the roundness but also the surface roughness of the cone. Experiments also confirm that the measurement of the laser micro interferometer is highly affected by the surface roughness of the cone because of the relative measurement principle of the laser micro interferometer.

Original language	English
Title of host publication	16th International Conference on Nanotechnology - IEEE NANO 2016
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	984-985
Number of pages	2
ISBN (Electronic)	9781509039142
DOIs	https://doi.org/10.1109/NANO.2016.7751479
Publication status	Published - 2016 Nov 21
Event	16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan Duration: 2016 Aug 22 → 2016 Aug 25

Publication series

Name	16th International Conference on Nanotechnology - IEEE NANO 2016

Other

Other	16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
Country/Territory	Japan
City	Sendai
Period	16/8/22 → 16/8/25

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

Access to Document

10.1109/NANO.2016.7751479

Cite this

Niu, Z., Kobayashi, R., Chen, Y., Shimizu, Y., Ito, S., & Gao, W. (2016). Nanometrology of an ultraprecision machined surface by using optical sensors. In 16th International Conference on Nanotechnology - IEEE NANO 2016 (pp. 984-985). [7751479] (16th International Conference on Nanotechnology - IEEE NANO 2016). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NANO.2016.7751479

Nanometrology of an ultraprecision machined surface by using optical sensors. / Niu, Zengyuan; Kobayashi, Ryo; Chen, Yuanliu et al.

16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. p. 984-985 7751479 (16th International Conference on Nanotechnology - IEEE NANO 2016).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Niu, Z, Kobayashi, R, Chen, Y, Shimizu, Y, Ito, S & Gao, W 2016, Nanometrology of an ultraprecision machined surface by using optical sensors. in 16th International Conference on Nanotechnology - IEEE NANO 2016., 7751479, 16th International Conference on Nanotechnology - IEEE NANO 2016, Institute of Electrical and Electronics Engineers Inc., pp. 984-985, 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016, Sendai, Japan, 16/8/22. https://doi.org/10.1109/NANO.2016.7751479

Niu Z, Kobayashi R, Chen Y, Shimizu Y, Ito S, Gao W. Nanometrology of an ultraprecision machined surface by using optical sensors. In 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc. 2016. p. 984-985. 7751479. (16th International Conference on Nanotechnology - IEEE NANO 2016). doi: 10.1109/NANO.2016.7751479

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Nanometrology of an ultraprecision machined surface by using optical sensors

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