Nanomechanics of ultrathin silicon beams and carbon nanotubes

Takahito Ono, Dongfang Wang, Shinya Sugimoto, Hidetoshi Miyashita, Masayoshi Esashi

Research output: Contribution to conferencePaper

2 Citations (Scopus)

Abstract

The nanomechanical properties of single-crystalline silicon cantilevers and carbon nanotubes, as a resonating element are investigated. As the dimensions of a resonating mechanical structure decrease, the energy loss due to the surface effect increases, which results in the decrease of Q-factors. However, a thermal treatment for single-crystalline silicon in ultra-high vacuum dramatically changes their properties. In this paper the Q-factors, gas adsorption effect and nonlinearity of mechanical spring are investigated on ultrathin single crystalline silicon resonators. Also the thermal treatment effect on a carbon nanotube resonator is examined.

Original languageEnglish
Pages33-36
Number of pages4
Publication statusPublished - 2003 Jul 23
EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
Duration: 2003 Jan 192003 Jan 23

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
CountryJapan
CityKyoto
Period03/1/1903/1/23

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Ono, T., Wang, D., Sugimoto, S., Miyashita, H., & Esashi, M. (2003). Nanomechanics of ultrathin silicon beams and carbon nanotubes. 33-36. Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.