Nanoindentation hardness and elastic modulus of AlGaN alloys

Y. Tokumoto, H. Taneichi, Y. Ohno, K. Kutsukake, H. Miyake, K. Hiramatsu, I. Yonenaga

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Nanoindentation hardness tests were conducted on various Al xGa1-xN alloys grown by metal-organic vapor-phase epitaxy. AlGaN alloys showed the hardness of 16.5-19.5 GPa strongly dependent on the alloy composition with a maximum at x∼0.5, while the Young's modulus was ∼ 300GPa, almost constant in the whole composition range investigated. The observed alloy hardening was confirmed under considering the effects of residual in-plane strain and threading dislocation densities.

Original languageEnglish
Title of host publication2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOIs
Publication statusPublished - 2013 Oct 18
Event10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, Japan
Duration: 2013 Jun 302013 Jul 4

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Other

Other10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
CountryJapan
CityKyoto
Period13/6/3013/7/4

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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