Nanoforming of metallic glass with nano-scale die fabricated by focused ion beam

Yasunori Saotome, Suguru Okaniwa, Tao Zhang, Akihisa Inoue

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Metallic glasses exhibit perfect Newtonian viscous flow in the supercooled liquid state and excellent micro/nano-formability under very low stresses. These alloys are therefore expected to become some of the most useful materials for fabricating nano-/micro-machines(NEMS, MEMS) and devices. The present paper introduces the fabrication technique of nano-structures by superplastic nanoforming with nano-scale die of Zr-based metallic glass fabricated by focused-ion-beam(FIB) technology and describes nano-formability of Pt-based metallic glass. Dies and the die forged l-μm-diameter micro gear, 500nm-high logo characters and 170 nm period dots for storage devices are demonstrated. Metallic glasses are highly useful as materials for nanoimprint, and as a material for FIB nanomachining.

Original languageEnglish
Pages (from-to)291-294
Number of pages4
JournalJournal of Metastable and Nanocrystalline Materials
Volume24-25
DOIs
Publication statusPublished - 2005 Dec 1

Keywords

  • Die
  • FIB
  • MEMS
  • Metallic glass
  • Microforming
  • Nanoforming
  • Superplasticity

ASJC Scopus subject areas

  • Materials Science (miscellaneous)
  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

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